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Depth discrimination in scanned heterodyne microscope systems
Authors:Michael G Somekh
Abstract:The optical transfer function of several scanning microscope systems is derived, using a physically intuitive approach. The technique allows a wide range of systems to be modelled with only minor modifications to the basic formulation. The results are then used to determine the response of various scanning microscopes for objects both in and out of the focal plane. The possibility of performing extended-focus phase imaging in heterodyne microscopes by scanning the sample along the optical axis is also examined. This mode of operation should allow measurements of minute topographical and phase variations on tilted or warped samples with the same lateral resolution as would be obtained when the sample is in focus throughout the entire scan.
Keywords:Scanning optical microscope  heterodyne  optical transfer function  interferometry  extended focus
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