Graphitization of porous 6H-SiC layers during thermal treatment in vacuum |
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| Authors: | V B Shuman N S Savkina |
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| Affiliation: | (1) Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia |
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| Abstract: | We have studied the effect of thermal treatment in vacuum on the optical transmission of 6H-SiC samples with a porous layer on the Si face in the visible and near infrared spectral range. An analysis of changes in the absorption coefficient shows that the process of graphitization begins at a temperature below 70°C. |
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