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Solvent‐Assisted Directed Self‐Assembly of Spherical Microdomain Block Copolymers to High Areal Density Arrays |
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| Authors: | Weiyin Gu Ji Xu Jung‐Keun Kim Sung Woo Hong Xinyu Wei Xiaomin Yang Kim Y. Lee David S. Kuo Shuaigang Xiao Thomas P. Russell |
| Affiliation: | 1. Department of Polymer Science and Engineering, 120 Governors Drive, University of Massachusetts, Amherst, MA 01003, USA;2. Seagate Technology, LLD. 47010 Kato Road, Fremont, CA 94538, USA |
| Abstract: | |
| Keywords: | block copolymers directed self‐assembly solvent annealing nanodots bit‐patterned media |