Effects of Post-Deposition Annealing and Oxygen Content on the Structural and pH-Sensitive Properties of Thin Nd $_{2}$O $_{3}$ Films

This paper describes the structural properties and sensing characteristics of thin Nd$_{2}$O$_{3}$ sensing membranes deposited on silicon substrates by means of reactive sputtering. X-ray diffraction, X-ray photoelectron spectroscopy, and atomic-force microscopy were used to study the chemical and morphological features of these films as functions of the growth conditions (argon-to-oxygen flow ratios of $20/5, 15/10$ and $10/15$; temperatures ranging from 600$~^{circ}$C to 800$~^{circ}$C). The thin Nd$_{2}$O$_{3}$ electrolyte-insulator-semiconductor devices prepared under a 15/10 flow ratio with subsequent annealing at 700$~^{circ}$C exhibited a higher sensitivity (56.01 mV/pH, in the solutions from pH 2 to 12), a smaller hysteresis voltage (4.7 mV in the pH loop $7 to 4 to 7to 10 to 7$), and a lower drift rate (0.41 mV/h in the pH 7 buffer solution) than did those prepared at the other conditions. We attribute this behavior to the optimal oxygen content in this oxide film forming a high density of binding sites and a small surface roughness.