| 21世纪初微电子技术发展展望 |
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| 引用本文： | 赵正平.21世纪初微电子技术发展展望[J].微纳电子技术,1999(1). |
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| 作者姓名： | 赵正平 |
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| 作者单位： | 电子部第十三研究所 |
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| 摘 要： | 综述了微电子领域中纳米技术、ＭＥＭＳ、Ｓｉ和ＧａＡｓ集成电路、微波／毫米波器件及宽禁带半导体技术目前的发展状况。在此基础上，对其在２１世纪初期的发展做了展望。
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| 关 键 词： | 纳米技术 MEMS 集成电路 宽禁带半导体 |
Prospects for the Microelectronics at the Beginning of Twenty First Century |
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| Zhao Zhengping.Prospects for the Microelectronics at the Beginning of Twenty First Century[J].Micronanoelectronic Technology,1999(1). |
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| Authors: | Zhao Zhengping |
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| Abstract: | The current status of nanotechnology,MEMS,Si and GaAs IC,microwave/millimeter wave devices as well as wide bandgap semiconductor technology in microelectronics are reviewed in this paper.And the development tendency concerning the abovementioned aspects at the beginning of twenty first century is forecasted. |
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| Keywords: | Nanotechnology MEMS IC Wide bandgap semiconductor |
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