| 强流离子注入均匀性控制 |
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| 引用本文： | 徐道林. 强流离子注入均匀性控制[J]. 微细加工技术, 1991, 0(1): 7-13 |
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| 作者姓名： | 徐道林 |
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| 作者单位： | 机电部第48研究所 长沙 |
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| 摘 要： | 本文讨论了强流离子注入机的全机械扫描靶室中实现剂量高均匀性和高重复性注入的变速扫描设计原理及控制技术。
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| 关 键 词： | 离子注入 均匀性 机械扫描 |
UNIFORMITY CONTROL OF HIGH CURRENT ION IMPLANTATION |
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| Xu Daolin. UNIFORMITY CONTROL OF HIGH CURRENT ION IMPLANTATION[J]. Microfabrication Technology, 1991, 0(1): 7-13 |
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| Authors: | Xu Daolin |
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| Abstract: | Design principles of speed change scanning and control techniques to realize high uniformity and high repeatability of implantation dose in full mechanical scanning target chamber of high current implantation system are discussed. |
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| Keywords: | Ion implantation system Mechanical scanning Uniformity of implantation. |
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