| TiNi表面磁控溅射DLC薄膜的纳米压痕与摩擦性能 |
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| 引用本文： | 刘敏,许晓静,张体峰,凌智勇,盛新兰,陈丹.TiNi表面磁控溅射DLC薄膜的纳米压痕与摩擦性能[J].润滑与密封,2012,37(3):42-44. |
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| 作者姓名： | 刘敏 许晓静 张体峰 凌智勇 盛新兰 陈丹 |
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| 作者单位： | 江苏大学先进成形技术研究所 江苏镇江212013 |
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| 基金项目： | 江苏省高校自然基金重大项目(11KJA430004);江苏大学优秀学术青年骨干培养对象基金项目(1211110001) |
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| 摘 要： | 采用室温磁控溅射技术在TiNi合金表面制备出DLC/SiC(类金刚石/碳化硅)双层薄膜(SiC为中间层),采用拉曼光谱仪、纳米压痕仪和球-盘式摩擦磨损仪研究DLC薄膜的结构、纳米压痕和摩擦性能.结果表明:制备的DLC/SiC薄膜石墨含量高、纳米硬度(5.493 GPa)低、弹性模量(62.2447 GPa)低.在以氮化硅球(半径为2mm)为对摩件,4.9N载荷、室温、Kokubo人体模拟体液润滑下,该DLC/SiC薄膜具有低且稳定的摩擦因数,其平均值约为0.094.
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| 关 键 词： | TiNi基材 DLC薄膜 纳米压痕 摩擦性能 磁控溅射 |
Nanoindentation and Friction Properties of Magnetron Sputtered DLC Films on TiNi Alloy |
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| Liu Min
,
Xu Xiaojing
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Zhang Tifeng
,
Ling Zhiyong
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Sheng Xinlan
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Chen Dan.Nanoindentation and Friction Properties of Magnetron Sputtered DLC Films on TiNi Alloy[J].Lubrication Engineering,2012,37(3):42-44. |
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| Authors: | Liu Min Xu Xiaojing Zhang Tifeng Ling Zhiyong Sheng Xinlan Chen Dan |
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| Affiliation: | Liu Min Xu Xiaojing Zhang Tifeng Ling Zhiyong Sheng Xinlan Chen Dan(Institute of Advanced Forming Technology,Jiangsu University,Zhenjiang Jiangsu 212013,China) |
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| Abstract: | The DLC/SiC(diamond-like carbon/silicon carbon)double layer films(SiC as interlayer)were deposited on TiNi alloy substrate by magnetron sputtering technology.The microstructure,nano-indentation and friction properties were investigated by using raman spectroscopy,nano indenter,and ball-on-disc type friction and wear tester.The results show that the DLC films have high concentration of graphite,low nano-hardness(5.493 GPa),low elastic modulus(62.244 7 GPa).As sliding against Si3N4(silicon nitride)ball(2 mm in radius)under 4.9 N load at room temperature and lubricated by Kokubo simulation body,the DLC films exhibited low and stable friction coefficient,with the mean value of friction coefficient about 0.094. |
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| Keywords: | TiNi substrate diamond-like carbon films nanoindentation friction properties magnetron sputtering |
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