一种新型的Pt-NiO混合敏感膜全固态 溶解CO2传感器及其特性测量

为了方便的测量溶解二氧化碳(CO₂),利用室温下NiO对CO₂的敏感特性,基于碳糊成膜方法,研制了一种新型全固态溶解CO₂传感器.文章中,分析了传感器的结构和NiO敏感膜对CO₂的敏感机理,测量了不同工作点和不同温度下传感器输出电压ΔV_rs随着溶解CO₂浓度变化的响应特性.实验结果显示,基于MISFET结构的Pt-NiO混合敏感膜溶解CO₂传感器可以在室温下方便的检测溶解CO₂浓度.

A Novel All-Solid-State Dissolved CO2 Sensor with Pt-NiO Mixed Sensing Film and Measurements of the Sensor's Characteristics

To measure the concentration of dissolved carbon dioxide,using the material NiO which is sensing to CO₂ at room temperature,a novel all-solid-state dissolved CO₂ sensor was developed based on the carbon-paste film forming.In this paper,the sensor structure and the sensing mechanism of NiO to CO₂ were discussed.And the response characteristics of Δ V_rs (the reference voltage shift) versus the dissolved CO₂ concentration which were bound at different biases and different temperatures were given.The experimental results show that the dissolved carbon sensor based on the MISFET structure with Pt-NiO mixed sensing film is feasible to determine the concentration of dissolved CO₂ at room temperature.