| 基于Modelica的MEMS系统级多领域建模与仿真 |
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| 引用本文： | 胡伟,魏昕,谢小柱. 基于Modelica的MEMS系统级多领域建模与仿真[J]. 传感技术学报, 2009, 22(10) |
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| 作者姓名： | 胡伟 魏昕 谢小柱 |
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| 作者单位： | 广东工业大学机电工程学院,广州,510006;广东工业大学机电工程学院,广州,510006;广东工业大学机电工程学院,广州,510006 |
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| 摘 要： | 分析了现有的MEMS系统级建模与仿真方法,讨论了运用Modelica语言进行面向对象的非因果关系建模方法,建立了基于Modelica的电容式微型静电致动器系统级模型,仿真结果证明了Modelica用于MEMS系统级多领域仿真的可行性.
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| 关 键 词： | Modelica 多领域仿真 面向对象 非因果关系模型 微型静电致动器 |
Multi-Domain Modeling and Simulation of MEMS Based on Modelica |
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| HU Wei,WEI Xin,XIE Xiaozhu. Multi-Domain Modeling and Simulation of MEMS Based on Modelica[J]. Journal of Transduction Technology, 2009, 22(10) |
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| Authors: | HU Wei WEI Xin XIE Xiaozhu |
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| Affiliation: | HU Wei,WEI Xin,XIE XiaozhuFaculty of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China |
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| Abstract: | The existed methods for the system level modeling and simulation of MEMS are analysed and methods of object-oriented and non-causal modeling with Modelica are discussed.The system level model of capacitive electrostatic microactuator based on Modelica is established and simulating results shows that Modelica can be effectively applied to the multi-domain modeling and the simulation of MEMS. |
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| Keywords: | Modelica |
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