| 中间层对薄膜附着强度的改进 |
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| 引用本文： | 孙亦宁. 中间层对薄膜附着强度的改进[J]. 真空与低温, 1999, 5(2): 70-76 |
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| 作者姓名： | 孙亦宁 |
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| 作者单位： | 兰州物理研究所!兰州７３００００ |
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| 摘 要： | 综述了影响薄膜附着力的因素，通过引入中间层，增强界面的附着力和减少应力来提高薄膜与衬底之间的结合强度。给出了一些采用中间层的例子。
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| 关 键 词： | 薄膜 中间层 附着力 表面和界面应力 |
USING INTERLAYER TO IMPROVE ADHESION BETWEEN FILMS AND SUBSTRATES |
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| Sun Yining. USING INTERLAYER TO IMPROVE ADHESION BETWEEN FILMS AND SUBSTRATES[J]. Vacuum and Cryogenics, 1999, 5(2): 70-76 |
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| Authors: | Sun Yining |
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| Abstract: | The factors, which are responsible for the adhesion between films and substrates, are brieflyreviwed. The binding strength of films may be improved by inserting inerlayer to incerase the adhesion anddecrease the stress between them. A number of examples involving interlayer are given in this paper. |
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| Keywords: | thin films interlayer adhesion stress of surface and interface |
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