Thermoelastic properties of micron-size actuators based on the Ti2NiCu//Pt composite with shape-memory effect |
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| Authors: | P. V. Mazaev V. V. Koledov V. G. Shavrov P. V. Lega A. V. Mashirov A. P. Kamantsev D. S. Kuchin D. V. Kolesov I. V. Yaminskii D. I. Zakharov V. A. Dikan A. V. Irzhak |
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| Abstract: | Thermomechanical properties of microactuators with shape-memory effect (SME) based on the Ti2NiCu/Pt layered composite are analyzed. Atomic-force microscopy is used to experimentally determine rigidity of the composite microactuators that represent cantilevers with sizes of 50 × 2 × 1 μm and a thickness of the SME active alloy layer of 0.5 μm in a temperature interval of 20–100°C. Forces that are exerted by the composite actuator on a microscopic object are quantitatively estimated. The experimental data are in reasonable agreement with the calculated results. |
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