| 金属氧化物半导体气敏材料的研究进展 |
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| 引用本文： | 赵义芬,赵鹤云,吴心惠.金属氧化物半导体气敏材料的研究进展[J].传感器世界,2009,15(1):6-11. |
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| 作者姓名： | 赵义芬 赵鹤云 吴心惠 |
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| 作者单位： | 1. 云南大学理科学技术学院
2. 云南大学物理科学技术学院 |
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| 基金项目： | 云南省科技厅应用基础研究项目，云南省教育厅自然科学重点研究项目，云南大学自然科学基金 |
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| 摘 要： | 金属氧化物是重要的半导体材料，具有较好的气敏特性，作为气敏材料被广泛应用。本文较系统地对金属氧化物气敏材料的研究现状作了阐述，重点介绍了复合氧化物气敏材料的研究状况，并对其气敏性质进行了概述。展望了金属氧化物半导体气敏材料今后的研究重点及发展方向。
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| 关 键 词： | 金属氧化物 复合氧化物 气敏性 气敏材料 |
Research progression of gas-sensitive materials of metal semiconductor oxides |
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| ZHAO Yi-fen,ZHAO He-yun,WU Xing-hui.Research progression of gas-sensitive materials of metal semiconductor oxides[J].Sensor World,2009,15(1):6-11. |
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| Authors: | ZHAO Yi-fen ZHAO He-yun WU Xing-hui |
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| Affiliation: | Materials Science and Engineering Department of Physical Science and Technology School;Yunnan University;Kunming;Yunan 650091;China |
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| Abstract: | The metal oxides with good gas-sensitive properties are indispensable semiconductor materials, which have been used as gas-sensitive materials widely. The present research situations of the metal-oxide gas-sensitive materials were outlined in this paper with the stresses on the compound oxide gas-sensitive materials and their gas-sensitive characteristics. On the basis of this, the future works and development directions of metal-oxide gas-sensitive materials are looked forward to in this paper. |
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| Keywords: | metal oxide compound oxide gas-sensing property gas-sensing material |
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