| 微型电磁继电器的制作和仿真分析 |
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| 引用本文： | 张宇峰,李德胜. 微型电磁继电器的制作和仿真分析[J]. 半导体学报, 2002, 23(12): 1298-1302. DOI: 10.3969/j.issn.1674-4926.2002.12.013 |
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| 作者姓名： | 张宇峰 李德胜 |
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| 作者单位： | 1. 哈尔滨工业大学自动化测试与控制系,哈尔滨,150001;2. 北京工业大学机电工程学院,北京,100022 |
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| 基金项目： | 国家自然科学基金;69976011; |
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| 摘 要： | 介绍了一种基于MEMS技术的微型电磁继电器的制作过程和仿真分析.这种微继电器的大小约是4mm×4mm×0.5mm,主要采用普通的微加工技术来完成全部制作工艺.与传统继电器相比,这种继电器采用平面线圈来代替螺线管线圈,有利于MEMS工艺,并且提出了一种双支撑的悬臂梁结构做为活动电极,具有较高的灵敏性和稳定性.另外,还进行了一些有关线圈通过激励电流后对活动电极产生电磁力的理论计算和仿真分析,利用这些结果可以对这种电磁继电器的结构和参数进一步优化.
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| 关 键 词： | 微型电磁继电器 MEMS 微加工技术 平面线圈 双支撑悬臂梁 |
Fabrication and Simulation of an Electromagnetic Microrelay |
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| Zhang Yufeng,Li Desheng. Fabrication and Simulation of an Electromagnetic Microrelay[J]. Chinese Journal of Semiconductors, 2002, 23(12): 1298-1302. DOI: 10.3969/j.issn.1674-4926.2002.12.013 |
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| Authors: | Zhang Yufeng Li Desheng |
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| Abstract: | The fabrication and simulation of an electromagnetic microrelay are presented based on micro electromechanical systems (MEMS) technique.The microrelay dimensions of about 4mm×4mm×0.5mm are fabricated with the common technique of micromachining.Compared with the traditional relays,a planar coil is substituted for a solenoid coil to favor the MEMS fabrication.Moreover,a bi-supporter cantilever beam with high sensitivity is fabricated to act as the movable electrode of the microrelay.Theoretical calculations and simulations are also carried out with respect to the electromagnetic force yielded by the exciting electromagnetic coil.The structure and parameters concerning the electromagnetic microrelay can be optimized using the results. |
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| Keywords: | electromagnetic microrelay MEMS micromachining planar coil cantilever beam |
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