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激光刻蚀工艺对Al2O3-ZrO2固溶度和结晶度的影响
引用本文:杨修春,DUBIEL M,HOFMEISTER H,RIEHEMANN W,黄文旻. 激光刻蚀工艺对Al2O3-ZrO2固溶度和结晶度的影响[J]. 无机材料学报, 2006, 21(3): 677-682. DOI: 10.3724/SP.J.1077.2006.00677
作者姓名:杨修春  DUBIEL M  HOFMEISTER H  RIEHEMANN W  黄文旻
作者单位:1. 同济大学材料科学与工程学院,上海,200092
2. Department of Physics,Martin Luther University of Halle, D-06108 Halle, Germany
3. Max Planck Institute of Microstructure Physics,Weinberg 2, D-06120 Halle, Germany
4. Department of Materials Science and Engineering, Clausthal University of Technology, 38678 Clausthal, Germany
摘    要:利用X射线衍射,X射线吸收精细结构谱和高分辨电镜研究了激光刻蚀工艺对Al2O3-ZrO2固溶度和结晶度的影响.结果表明,Al2O3在ZrO2中的固溶度越大,ZrO2晶体结构无序度越大.样品室的空气压力越大,粉体中无定形相的含量越大.无定形ZrO2中存在短程有序-长程无序结构Zr-O-Zr(Al).同Al2O3-ZrO2固溶体相比,无定形ZrO2具有更短的Zr-O和Zr-Zr(Al)原子间距离和更大的无序度.

关 键 词:激光刻蚀  Al2O3-ZrO2固溶度  结晶度  无序度
文章编号:1000-324X(2006)03-0677-06
收稿时间:2005-06-13
修稿时间:2005-06-132005-08-26

Influences of Laser Ablation Processes on Solubility and Crystallizability of Al2O3-ZrO2 Nanopowders
YANG Xiu-Chun,DUBIEL M,HOFMEISTER H,RIEHEMANN W,HUANG Wen-Hai. Influences of Laser Ablation Processes on Solubility and Crystallizability of Al2O3-ZrO2 Nanopowders[J]. Journal of Inorganic Materials, 2006, 21(3): 677-682. DOI: 10.3724/SP.J.1077.2006.00677
Authors:YANG Xiu-Chun  DUBIEL M  HOFMEISTER H  RIEHEMANN W  HUANG Wen-Hai
Affiliation:1. School of Materials Science and Engineering, Tongji University Shanghai 200092, China; 2. Department of Physics, Martin Luther University of Halle, D-06108 Halle, Germany; 3. Max Planck Institute of Microstructure Physics,Weinberg 2, D-06120 Halle, Germany; 4. Department of Materials Science and Engineering, Clausthal University of Technology, 38678 Clausthal, Germany
Abstract:The influences of laser ablation processes on the solubility and the crystallizability of laser evaporated Al2O3-ZrO2 nanopowders were studied by X-ray diffractometer (XRD), X-ray absorption fine structure (XAFS) spectroscope and high resolution electron microscope (HREM). Results indicate that ZrO2 crystalline lattice with an increasing solid solubility exhibits larger disorder. Increasing air pressure in the sample chamber favors the formation of amorphous ZrO2. Amorphous ZrO2 consists of Zr-O-Zr (Al) clusters with short-range order but long-range disorder. The Zr-O and Zr-Zr (Al) interatomic distances in amorphous ZrO2 are shorter and the disorder of amorphous ZrO2 is larger than that of crystalline Al2O3-ZrO2 solid solutions.
Keywords:laser ablation   Al2O3-ZrO2 solubility   crystallizability   disorder
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