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Liquid crystal alignment films produced by the R.F. Plasma beam technique
Authors:G J Sprokel
Affiliation:1. IBM Research Laboratory, 95193, San Jose, California
Abstract:An rf plasma system is described suitable for deposition of anisotropic SiO(in2) films capable of aligning liquid crystal cells parallel to the substrate surface at approximately zero tilt and perpendicular to the plane of incidence. The electrooptical response of twisted cells made by this technique and their ε(H) curves are discussed.
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