TiCxNy and TiCx-TiN films obtained by CVD in an ultrasonic field |
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Authors: | T. Takahashi H. Itoh |
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Affiliation: | (1) Department of Applied Chemistry, Faculty of Engineering, Nagoya University, 464 Nagoya, Japan |
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Abstract: | TiCxNy mono- and TiCx-TiN double-layer films with a thickness of 30 to 100 m were prepared on a carbon steel (C: 0.6 to 0.7%) substrate by CVD in an ultrasonic field (ultrasound frequency: 19kHz; power: 10 to 20Wcm–2). The moderate deposition conditions for obtaining an adherent and thick film of TiCx Ny were: substrate temperature: 1050° C; H2, N2, TiCl4 and CH4 flow rates: 6.2, 4.0, 0.9 and 0.26 to 2.0 ml sec–1, respectively. The growth rate, grain size and degree of 2 2 0 preferred orientation were found to decrease with increase in CH4 concentration. TiCx Ny film on carbon steel had a Vickers microhardness of 1800 to 2600 and an adhesion strength to the substrate of more than 120 kg cm–2. A TiCx-TiN (x0.5) double-layer film was obtained at 1050° C by a controlled alternative deposition of TiCx or TiN. Quasiepitaxial growth of crystallites in the double layers was found to prevail in both coatings of TiCx (220)/TiN (220)/steel and TiN (200)/TiCx (200)/steel. |
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