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脉冲激光烧蚀金属氧化物的物理化学过程及反应机理
引用本文:党海军,秦启宗. 脉冲激光烧蚀金属氧化物的物理化学过程及反应机理[J]. 量子电子学报, 2004, 21(2): 216-223
作者姓名:党海军  秦启宗
作者单位:西北核技术研究所,陕西,西安,710024;复旦大学化学系,激光化学研究所,上海,200433
摘    要:本文回顾了前人有关脉冲激光烧蚀过程的各种理论模型,重点综述了脉冲激光烧蚀金属氧化物的物理化学过程及反应机理,并对激光能量不很高时金属氧化物的烧蚀过程提出了热控制机制的新观点。

关 键 词:激光技术  脉冲激光烧蚀(PLA)  烧蚀机理  金属氧化物
文章编号:1007-5461(2004)02-0216-08
收稿时间:2003-11-27
修稿时间:2003-11-27

Physical and chemical processes and mechanism of pulsed laser ablation of metal oxides
DANG Hai-jun,QIN Qi-zong. Physical and chemical processes and mechanism of pulsed laser ablation of metal oxides[J]. Chinese Journal of Quantum Electronics, 2004, 21(2): 216-223
Authors:DANG Hai-jun  QIN Qi-zong
Abstract:Previous works on the theoretical models of pulsed laser ablation were summarized. Our recent studies of the physicochemical processes and mechanisms for pulsed laser ablation of metal oxides were briefly reviewed. A novel thermal-controlling mechanism was proposed for the pulsed laser ablation of metal oxides when the laser fluence was not very high.
Keywords:laser techniques  pulsed laser ablation  ablation mechanism  metal oxides
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