Vapor pressures of Y, Ba, Cu precursors for the growth of YBa2Cu3O7 by MOVPE

The vapor pressures of the-diketonates Y(THD), Ba(THD), and Cu(THD), commonly used as precursors for MOVPE of YBa₂Cu₃O₇, and Y(MCP) were measured at different temperatures. A time-resolved static method recording the pressure vs. time at constant temperature was used, permitting us to deduce the vapor pressure even if the materials tend to decompose. The values of the constants of the Clausius-Clapeyron equation log₁₀p(T)/p ₀=A-B/T are,A=11.7, 8.7, 8.27, 16.6 andB=4359, 2654, 3602, and 6453 K for Y(THD), Y(MCP), Ba(THD), and Cu(THD), respectively withp ₀= 1 Pa and temperatureT in K. The thermal stability of the sources was measured and are discussed.