| 十六氯酞菁锌有机半导体材料的合成及其气敏性研究 |
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| 引用本文： | 施云波,雷廷平,李赞,修德斌,赵文杰,冯侨华,王立权.十六氯酞菁锌有机半导体材料的合成及其气敏性研究[J].半导体学报,2009,30(3):034009-5. |
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| 作者姓名： | 施云波 雷廷平 李赞 修德斌 赵文杰 冯侨华 王立权 |
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| 作者单位： | Mechanical;Engineering;Center;Post-doctoral;Studies;Harbin;University;School;Measurement;Control;Tech;Communications;Science;Technology;Applied;Sciences;Life;Chemistry; |
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| 基金项目： | 国家自然科学基金与国家高技术研究发展计 |
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| 摘 要： | Due to the difficulty in synthesizing perhalogenated metallophthalocyanine, the method of ammonium molybdate solid phase catalysis was introduced, and by using tetrachlorophthalic anhydride and urea as the raw materials, hexadecachloro zinc phthalocyanine （ZnPcCl16） was synthesized. Components of the composite were analyzed by energy spectrum, and its functional group structures and absorption peaks were characterized by IR and UV-vis spectroscopy. The thin films of gas sensors were prepared in a vacuum evaporation system and evaporated onto SiO2 substrates, where sensing electrodes were made by MEMS micromachining. The optimal conditions for the films are： substrate temperature of 150 ℃ evaporation current of 95 A and film thickness of 50 nm. The result showed that the sensors were ideally sensitive to Cl2 gas and could detect the minimum concentration of 0.3 ppm.
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| 关 键 词： | 有机半导体 合成 酞菁锌 真空蒸发系统 气体传感器 气敏 薄膜厚度 官能团结构 |
| 收稿时间： | 8/25/2008 2:42:31 PM |
Synthesis of organic semiconductor hexadecachloro zinc phthalocyanine and its gas sensitivity |
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| Shi Yunbo,Lei Tingping,Li Zan,Xiu Debin,Zhao Wenjie,Feng Qiaohua and Wang Liquan.Synthesis of organic semiconductor hexadecachloro zinc phthalocyanine and its gas sensitivity[J].Chinese Journal of Semiconductors,2009,30(3):034009-5. |
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| Authors: | Shi Yunbo Lei Tingping Li Zan Xiu Debin Zhao Wenjie Feng Qiaohua and Wang Liquan |
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| Affiliation: | Mechanical Engineering Center for Post-doctoral Studies, Harbin Engineering University, Harbin 150001, China;School of Measurement Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, China;School of Applied Sciences, Harbin University of Science and Technology, Harbin 150080, China;School of Life Science and Chemistry, Harbin University, Harbin 150086, China;School of Measurement Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, China;School of Applied Sciences, Harbin University of Science and Technology, Harbin 150080, China;School of Measurement Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, China;Mechanical Engineering Center for Post-doctoral Studies, Harbin Engineering University, Harbin 150001, China |
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| Abstract: | Due to the difficulty in synthesizing perhalogenated metallophthalocyanine,the method of ammonium molybdate solid phase catalysis was introduced,and by using tetrachlorophthalic anhydride and urea as the raw materials,hexadecachloro zinc phthalocyanine(ZnPcCl16) was synthesized.Components of the composite were analyzed by energy spectrum,and its functional group structures and absorption peaks were characterized by IR and UV-vis spectroscopy.The thin films of gas sensors were prepared in a vacuum evaporatio... |
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| Keywords: | hexadecachloro zinc phthalocyanine organic semiconductor gas sensitivity |
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