| 新型PST铁电薄膜的制备及其电性能研究 |
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| 引用本文： | 李元昕,刘梅冬,曾亦可,姜胜林,邓传益. 新型PST铁电薄膜的制备及其电性能研究[J]. 材料导报, 2003, 17(Z1): 218-221 |
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| 作者姓名： | 李元昕 刘梅冬 曾亦可 姜胜林 邓传益 |
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| 作者单位： | 华中科技大学电子科学与技术系,武汉,430074 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划)，90201028，2002AA325080，， |
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| 摘 要： | PST铁电薄膜是一种具有优良铁电、热释电和介电等性能的铁电材料.该材料在红外探测器、红外焦平面阵列、热成像器件、非易失性铁电存储器和大容量电容器等方面具有广泛的应用.PST铁电薄膜的制备方法多种多样,各具优缺点,不同的制备工艺对薄膜的性能有影响.叙述了PST铁电薄膜的制备技术、电性能和在热释电红外探测器方面的应用.
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| 关 键 词： | PST薄膜 制备工艺 铁电性 热释电性 介电性 |
A Review of Preparation Methods and Electrical Properties of New PST Thin Films |
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| LI Yuanxin LIU Meidong ZENG Yike JIANG Shenglin DENG Chuanyi. A Review of Preparation Methods and Electrical Properties of New PST Thin Films[J]. Materials Review, 2003, 17(Z1): 218-221 |
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| Authors: | LI Yuanxin LIU Meidong ZENG Yike JIANG Shenglin DENG Chuanyi |
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| Abstract: | PST thin films are ferroelectric materials with many advantages such as excellent ferroelectric, pyroelectric and dielectric properties. They have a wide range of applications in pyroelectric infrared devices, uncooled infrared focal plane arrays, infrared thermal imaging devices, non-volatile ferroelectric RAM and large value capacitor. There are many methods for preparation of PST thin films, and each has its advantages and disadvantage . The properties of PST thin films depend on the preparation conditions . This paper reviews the preparation methods and electrical properties of PST thin films. |
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| Keywords: | PST thin film preparation methods ferroelectric properties pyfroelectric properties dielectric properties |
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