数字式、微型化、低功耗电容测微仪的研究

介绍一种新型电容测微仪.通过测头与测量电路的一体化设计,精缩了仪器体积;采用差动测头结构,减少了由于环境变化引起的测量误差;使用数字信号传输测量结果,增加了信号的传输距离,提高了抗干扰能力.给出了电容量和被测距离之间的非线性关系的直线拟合方法.研究结果表明:有效直径为3 mm的传感器测量范围为±80 μm,分辨力达到0.01 μm,时间稳定性达到0.01 μm/h.

Study On Low Power Subminature Digital Capacitance Micrometer

A new type of capacitance micrometer is introduced. Integrating the probe and metering circuit minifies the instrument volume. Using a differential structured sensor reduces measure error. And also digital signal is applied to increase the signal transmitting range and to raise anti-jamming ability. The paper puts forward a linear fitting method of non-linear relation between capacitance and distance measure. The study shows that the sensor has a measuring range of ±80 m, the resolving power of 0.01 m and the time stability of 0.01 m/H with a 3mm effective diameter.