Feed-forward compensation of surface potential in atomic force microscopy

We introduce a feed-forward technique for lift-mode Kelvin probe force microscopy to minimize electrostatically induced errors in topography scans. Such errors typically occur when a grounded tip is scanned over a heterogeneous sample with differences in local work function or areas of local surface charging. To minimize electrostatic forces during the topography scan we bias the tip with the surface potential recorded in the previous Kelvin probe scan line. With this method we achieve an error free topography on samples with large variations in local surface potential. Compared to conventional tapping mode, we further observe a significant reduction of tip-induced surface charge modifications on charge patterns written in electret films.