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结构函数法评估漏源电压对AlGaAs/InGaAs PHEMTs热阻的影响
引用本文:马琳,冯士维,张亚民,邓兵,岳元.结构函数法评估漏源电压对AlGaAs/InGaAs PHEMTs热阻的影响[J].半导体学报,2014,35(9):094006-5.
作者姓名:马琳  冯士维  张亚民  邓兵  岳元
基金项目:国家自然科学基金;市自然科学基金;中国广东战略新兴产业工程;北京工业大学博士创新基金
摘    要:本文通过实验测量和仿真研究了不同漏源电压对AlGaAs/InGaAs PHEMTs热阻的影响。结果表明,等功率下,热阻随着漏源电压的减小呈下降趋势,并且小电压大电流下热阻值最小。应用结构函数法可以分别提取出芯片级和封装级的热阻值。模拟结果表明,沟道中电场最强的地方出现在靠近漏一侧的栅边缘,相对较小的漏源电压产生的电场也较低,这就是导致等功率下热阻随漏源电压下降的原因。

关 键 词:AlGaAs/InGaAs  PHEMTs,结构函数法,热阻,漏源电压
修稿时间:4/8/2014 12:00:00 AM

Evaluation of the drain-source voltage effect on AlGaAs/InGaAs PHEMTs thermal resistance by the structure function method
Ma Lin,Feng Shiwei,Zhang Yamin,Deng Bing and Yue Yuan.Evaluation of the drain-source voltage effect on AlGaAs/InGaAs PHEMTs thermal resistance by the structure function method[J].Chinese Journal of Semiconductors,2014,35(9):094006-5.
Authors:Ma Lin  Feng Shiwei  Zhang Yamin  Deng Bing and Yue Yuan
Affiliation:Institute of Semiconductor Device Reliability Physics, College of Electronic Information & Control Engineering, Beijing University of Technology, Beijing 100124, China;Institute of Semiconductor Device Reliability Physics, College of Electronic Information & Control Engineering, Beijing University of Technology, Beijing 100124, China;Institute of Semiconductor Device Reliability Physics, College of Electronic Information & Control Engineering, Beijing University of Technology, Beijing 100124, China;Institute of Semiconductor Device Reliability Physics, College of Electronic Information & Control Engineering, Beijing University of Technology, Beijing 100124, China;Institute of Semiconductor Device Reliability Physics, College of Electronic Information & Control Engineering, Beijing University of Technology, Beijing 100124, China
Abstract:The effect of drain-source voltage on AlGaAs/InGaAs PHEMTs thermal resistance is studied by experimental measuring and simulation. The result shows that AlGaAs/InGaAs PHEMTs thermal resistance presents a downward trend under the same power dissipation when the drain-source voltage (VDS) is decreased. Moreover, the relatively low VDS and large drain-source current (IDS) result in a lower thermal resistance. The chip-level and package-level thermal resistance have been extracted by the structure function method. The simulation result indicated that the high electric field occurs at the gate contact where the temperature rise occurs. A relatively low VDS leads to a relatively low electric field, which leads to the decline of the thermal resistance.
Keywords:AlGaAs/InGaAs PHEMTs  structure function method  thermal resistance  drain-source voltage
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