| 基于MEMS技术的微型磁性开关阵列 |
| |
| 引用本文： | 李德胜,张鹏飞,藤田博之.基于MEMS技术的微型磁性开关阵列[J].传感器与微系统,2000,19(5):24-26. |
| |
| 作者姓名： | 李德胜 张鹏飞 藤田博之 |
| |
| 作者单位： | 1. 哈尔滨工业大学,自动化测试与控制系,黑龙江,哈尔滨,150001
2. 日本国东京大学,生产技术研究所,106-8558 |
| |
| 摘 要： | 为了在二维微驱动系统中实时检出磁性移动块的存在位置 ,提出并试制了一种基于MEMS工艺的微型磁性开关阵列 ,它作为一种位置传感器通过扫描查询方式工作。对该传感器的工作原理、制做工艺做了详细的描述 ,并给出了一些实验结果。
|
| 关 键 词： | 微机械 传感器 传感器阵列 开关 磁场 |
| 修稿时间： | : |
Micro magnetic switch array based on MEMS technology |
| |
| LI De-sheng,ZHANG Peng-fei,FIJITA Hiro-yuki.Micro magnetic switch array based on MEMS technology[J].Transducer and Microsystem Technology,2000,19(5):24-26. |
| |
| Authors: | LI De-sheng ZHANG Peng-fei FIJITA Hiro-yuki |
| |
| Affiliation: | LI De-sheng-1,ZHANG Peng-fei-1,FIJITA Hiro-yuki-2 |
| |
| Abstract: | In order to sense the presence of magne tic slider in a two-dimensional micro electro-mechanical system (MEMS), the a uthors proposed and developed a novel micro magnetic switch array, which is used as a position sensor and functions by scanning. This paper introduces its sensi ng principle, fabrication process and some experimental results. |
| |
| Keywords: | micro electro-mechanical system(MEMS ) sensor sensor array switch magnetic field |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
