| 基于MEMS技术的微型磁性开关阵列 |
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| 引用本文： | 李德胜,张鹏飞,藤田博之. 基于MEMS技术的微型磁性开关阵列[J]. 传感器与微系统, 2000, 19(5): 24-26 |
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| 作者姓名： | 李德胜 张鹏飞 藤田博之 |
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| 作者单位： | 1. 哈尔滨工业大学,自动化测试与控制系,黑龙江,哈尔滨,150001
2. 日本国东京大学,生产技术研究所,106-8558 |
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| 摘 要： | 为了在二维微驱动系统中实时检出磁性移动块的存在位置 ,提出并试制了一种基于MEMS工艺的微型磁性开关阵列 ,它作为一种位置传感器通过扫描查询方式工作。对该传感器的工作原理、制做工艺做了详细的描述 ,并给出了一些实验结果。
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| 关 键 词： | 微机械 传感器 传感器阵列 开关 磁场 |
| 修稿时间： | : |
Micro magnetic switch array based on MEMS technology |
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| LI De-sheng,ZHANG Peng-fei,FIJITA Hiro-yuki. Micro magnetic switch array based on MEMS technology[J]. Transducer and Microsystem Technology, 2000, 19(5): 24-26 |
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| Authors: | LI De-sheng ZHANG Peng-fei FIJITA Hiro-yuki |
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| Affiliation: | LI De-sheng-1,ZHANG Peng-fei-1,FIJITA Hiro-yuki-2 |
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| Abstract: | In order to sense the presence of magne tic slider in a two-dimensional micro electro-mechanical system (MEMS), the a uthors proposed and developed a novel micro magnetic switch array, which is used as a position sensor and functions by scanning. This paper introduces its sensi ng principle, fabrication process and some experimental results. |
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| Keywords: | micro electro-mechanical system(MEMS ) sensor sensor array switch magnetic field |
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