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钛合金表面多弧离子镀TiAlN薄膜微观组织结构及性能研究
引用本文:袁建鹏. 钛合金表面多弧离子镀TiAlN薄膜微观组织结构及性能研究[J]. 热喷涂技术, 2012, 4(3): 84-88
作者姓名:袁建鹏
作者单位:北京矿冶研究总院,北京100160 北京市工业部件表面强化与修复工程技术研究中心,北京100160
摘    要:采用多弧离子镀技术在TC11钛合金基体上沉积了TiAlN涂层。金相截面组织观察和扫描电镜表面形貌照片显示,制备出的膜层连续、光滑、孑L隙率低、组织致密;X射线衍射分析表明,膜层的相结构中大致含有以下组成相:(Ti,A1)N、Ti2A1N、Ti。用EDS能谱分析对膜层中的元素含量进行了测定,发现Al元素出现了成分负偏析。性能测试表明,TiAlN膜具有较高的硬度和膜/基结合力。

关 键 词:多弧离子镀  TiAlN涂层  TC11钛合金  微观结构  性能

Microstructure and Performance Research of TiAIN Coatings Deposited by Multi-arc Ion Plating on TC11 Titanium Alloy
YUAN Jian-peng. Microstructure and Performance Research of TiAIN Coatings Deposited by Multi-arc Ion Plating on TC11 Titanium Alloy[J]. Thermal Spray Technology, 2012, 4(3): 84-88
Authors:YUAN Jian-peng
Affiliation:YUAN Jian-peng (1.Beijing General Research Institute of Mining and Metallurgy, Beijing 100160; 2.Beijing Engineering Technology Research Center of Surface Strengthening and Repairing of Industry parts, Beijing 100160)
Abstract:TiA1N coating was deposited on TC11 titanium alloy by multi-arc ion plating technique. Through metallograph on cross section and electron microscope, continuous, smooth, low-porosity and tight films can be seen. X-ray diffraction analysis (XRD) show that the films mainly have the following phases: (Ti, A1)N, Ti2A1N, Ti. Finally, the EDS is used to measure the element contents of TiA1N films.The content of AI in the TiAIN film was found to be less than that in the target. Properties experiments show that TiA1N films have high micro-hardness and film-matrix strength.
Keywords:Multi-arc Ion Plating  TiA1N film  TC 11 titanium alloy  Microstructure  Properties
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