Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect

Dynamic behaviour of oscillating perforated microplates under the effect of squeeze film damping is analyzed. Two simplified finite element numerical approaches are adopted to predict damping and stiffness effects transferred from the surrounding ambient air to oscillating structures; the effects of holes cross section and plate dimension are observed. The applicability of the numerical models in terms of precision of results and mesh density is investigated. Results obtained by FE models are compared with experimental measurements conduced by an optical interferometric microscope.