| 采用数字校正、PWM反馈技术的硅微加速度计 |
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| 引用本文： | 安康 苏岩. 采用数字校正、PWM反馈技术的硅微加速度计[J]. 传感技术学报, 2006, 19(5): 2233-2235 |
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| 作者姓名： | 安康 苏岩 |
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| 作者单位： | 1. 东南大学仪器科学与工程系,南京,210096
2. 南京理工大学机械工程学院,南京,210094 |
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| 摘 要： | 本文提出了基于数字信号处理器TMS320F2810的数字控制、PWM静电力反馈硅微加速度计方案.介绍了该方案的基本工作原理,建立了相应的闭环系统数学模型,并在s域设计了系统校正环节.文章还提出了数字校正环节的设计方法,并分析了其对系统动态特性的影响.该方案可以实现硅微加速度计的数字闭环控制,并可以实现加速度计的PWM数字信号输出.
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| 关 键 词： | 硅微加速度计 数字控制 PWM 静电力反馈 |
| 文章编号： | 1004-1699(2006)05-2233-03 |
| 修稿时间： | 2006-07-01 |
Micro-accelerometer Utilizing Digital Control and PWM Electrostatic Servo Technique |
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| An Kang Su Yan. Micro-accelerometer Utilizing Digital Control and PWM Electrostatic Servo Technique[J]. Journal of Transduction Technology, 2006, 19(5): 2233-2235 |
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| Authors: | An Kang Su Yan |
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| Affiliation: | Southeast University, Instrument science and engineering dept.1,210096)(Nanjing University of Technology and Engineering, Mechanical Engineering College2,210094 |
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| Abstract: | Micro-accelerometer utilizing digital control and PWM electrostatic servo technique based on TMS320F2810 is introduced. The basic detection principle is presented and the principle of operation is analyzed.The math-model of close-loop system is established and calibration module in s region is designed.The method of designing digital calibration module is introduced and its influence on system's dynamic performance is researched. Close-loop digital control and PWM output of micro-accelerometer are realized. |
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| Keywords: | PWM |
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