| ����Ũ�ȶ�CVD�ྦྷ���ʯ��Ĥ�Ͼ���Ӱ�� |
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| 引用本文： | 朱宏喜,兀松,黄立龙,温成芳,徐素芳,李佳. ����Ũ�ȶ�CVD�ྦྷ���ʯ��Ĥ�Ͼ���Ӱ��[J]. 物理测试, 2014, 32(1): 7-10 |
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| 作者姓名： | 朱宏喜 兀松 黄立龙 温成芳 徐素芳 李佳 |
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| 作者单位： | 1. ??????????????????????????? ???? 471023 ; 2. ???????????????????Э?????????????? ???? 471023 |
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| 基金项目： | 河南省高校科技创新团队支持计划资助项目（2012IRTSTHN008）;河南科技大学博士科研启动基金（09001233）资助项目;河南科技大学SRTP资助项目（2012036） |
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| 摘 要： | 利用扫描电镜、X射线衍射和电子背散射衍射研究了CVD自支撑金刚石薄膜的表面形貌组织、织构和晶界分布。研究表明:金刚石薄膜制备气氛纯度较低,造成薄膜中存在较多孪晶。沉积气体中甲烷浓度升高,孪晶发生频率增加,孪晶对织构组分的影响程度增加。高频率孪晶使薄膜中{100}织构转变为{122}织构,但没有观察到明显的{511}和{411}孪晶织构,说明孪晶取向的变化具有一定的选择性。
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| 关 键 词： | ??????????????????????????????????????? |
Effect of Methane Concentration on Twins in CVD Polycrystalline Diamond Film |
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| ZHU Hong-xi,WU Song,HUANG Li-long,WEN Cheng-fang,XU Su-fang,LI Jia. Effect of Methane Concentration on Twins in CVD Polycrystalline Diamond Film[J]. Physics Examination and Testing, 2014, 32(1): 7-10 |
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| Authors: | ZHU Hong-xi WU Song HUANG Li-long WEN Cheng-fang XU Su-fang LI Jia |
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| Affiliation: | 1. School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang 471023, Henan, China ;2. Collaborative Innovation Center of Nonferrous Metals, Henan Province, Laoyang 471023, Henan,China |
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| Abstract: | The surface morphology, texture and grain boundary distribution of CVD free-standing diamond film were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD) and electron backscatter diffraction (EBSD). It is shown that the preparation atmosphere with lower purity induced a number of twins in diamond film, the frequency of twins increased with the raise of methane concentration, which brought an increased effect on the texture. {100} texture was turned to {122} texture by the high frequency twins, but {511} and {411} textures were not found, indicating that the changed twin orientations were selective to some extent. |
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| Keywords: | diamond film methane concentration twin texture EBSD |
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