Self-consistent model of a low-pressure rf capacitive discharge

A simple self-consistent model of a low-pressure rf capacitive discharge is formulated. Effects associated with stochastic heating of the electrons and the nonlocal nature of the electric field are taken into account. The relations obtained can be used for a qualitative analysis of the main features of these low-pressure discharges. The results of the numerical calculations show good agreement with available experimental data. Pis’ma Zh. Tekh. Fiz. 23, 39–45 (January 12, 1997)