| 一种压电陶瓷微位移测量的新方法 |
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| 引用本文： | 范彦平,朱灵,巫建东,许良元,翟玉锋,朱震,刘勇,王安. 一种压电陶瓷微位移测量的新方法[J]. 压电与声光, 2010, 32(1) |
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| 作者姓名： | 范彦平 朱灵 巫建东 许良元 翟玉锋 朱震 刘勇 王安 |
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| 作者单位： | 中国科学院,安徽光学机密机械研究所激光中心,安徽,合肥,230031 |
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| 基金项目： | 中国科学院合肥研究院基金及创新科研专题基金资助项目 |
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| 摘 要： | 提出了一种简单、有效的基于光纤Fabry-Perot干涉的压电陶瓷(PZT)微位移测量的新装置,为提高干涉现象,在Fabry-Perot干涉腔两端面上分别镀不同反射率的薄膜.通过软件编程快速实现对干涉条纹的计数进而确定PZT的微位移,得到的位移电压斜率误差小,实现了对PZT微位移的实时快速测量.测试了同频率不同腔长和同腔长不同频率的压电特性,结果表明变化很小,说明该方法可操作性强,可靠性高.分析了光纤耦合效率和光源的相干性等对实验的影响.
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| 关 键 词： | 光纤Fabry-Perot干涉 压电特性 微位移 干涉条纹 |
A New Method of Detecting the Microdisplacement of PZT |
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| FAN Yan-ping,ZHU Ling,WU Jian-dong,XU Liang-yuan,ZHAI Yu-feng,ZHU Zhen,LIU Yong,WANG An. A New Method of Detecting the Microdisplacement of PZT[J]. Piezoelectrics & Acoustooptics, 2010, 32(1) |
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| Authors: | FAN Yan-ping ZHU Ling WU Jian-dong XU Liang-yuan ZHAI Yu-feng ZHU Zhen LIU Yong WANG An |
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| Affiliation: | FAN Yan-ping,ZHU Ling,WU Jian-dong,XU Liang-yuan,ZHAI Yu-feng,ZHU Zhen.LIU Yong,WANG An (Anhui Institute of Optics , Fine Mechanics Chiness Acamdemy of Science Laser Centre,Hefei 230031,China) |
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| Abstract: | A simple and effective approach,based on fiber optic Fabry-Perot interferometer,was proposed to detect the micro displacement of PZT.In order to promote the phenomenon of interference,both side of Fabry-Perot cavity were coated film with different reflectivity.The PZT micro displacement was acquired by programming software to counting the number of fringes.The obtained slope inaccuracy of displacement to voltage was small,and a rapid and real-time testing of PZT micro displacement was realized.Piezoelectric... |
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| Keywords: | fiber optic Fabry-Perot interference piezoelectric property microdisplacement fringe |
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