| 1J22合金材料应用于溅射垂直磁记录薄膜的尝试 |
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| 引用本文： | 陈远星,刘志坚,黄伟嘉. 1J22合金材料应用于溅射垂直磁记录薄膜的尝试[J]. 南方钢铁, 2012, 0(2): 7-8,24 |
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| 作者姓名： | 陈远星 刘志坚 黄伟嘉 |
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| 作者单位： | 广东省钢铁研究所,广东广州510640 |
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| 摘 要： | 1J22合金带作为溅射靶材的一种尝试，充分利用1J22合金冷轧带材产品具有高饱和磁感应强度、高居里温度、成分均匀、纯度高的优点．避免粉末法制备FeCo产品所产生的纯度低、成分不均匀等缺陷．磁控溅射出成分均匀、磁性能较好，用于垂直磁记录的薄膜，可以替代其它FeCo和FeNi合金靶材，成为更加理想的垂直磁记录溅射靶材．
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| 关 键 词： | 1J22合金 溅射靶材 垂直磁记录薄膜 磁性能 居里温度 |
1J22 magnetic alloy used as a sputtering target material in fabricating perpendicular magnetic recording films |
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| CHEN Yuan-xing,LIU Zhi-jian,HUANG Wei-jia. 1J22 magnetic alloy used as a sputtering target material in fabricating perpendicular magnetic recording films[J]. , 2012, 0(2): 7-8,24 |
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| Authors: | CHEN Yuan-xing LIU Zhi-jian HUANG Wei-jia |
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| Affiliation: | (Guangdong Institute for Iron and Steel, Guangzhou 510640, Guangdong) |
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| Abstract: | Possessing high saturation magnetic flux density, high Curie temperature and highly pure and homogeneous com- position, the cold-rolled 1J22 magnetic alloy strip was attempted as a sputtering target material in fabricating perpendicular recording films. The alloy was superior to the FeCo one made by powder method in fabricating this kind of recording films, due to the high purity and homogeneous composition of the former. Films with good magnetic performance and homogeneous composition for perpendicular magnetic recording could be fabricated by means of the 1J22-sputtering method; and it was shown that the 1J22 alloy, used as a sputtering target alloy, could be substituted for FeCo and FeNi alloys in fabricating perpendicular magnetic recording films. |
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| Keywords: | 1J22 alloy sputtering targets perpendicular magnetic recording thin film magnetic performance Curie tem- perature |
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