| 基于感应耦合等离子刻蚀技术的三维微拉伸梁制作工艺 |
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| 引用本文： | 张段芹,褚金奎,侯志武,王立鼎.基于感应耦合等离子刻蚀技术的三维微拉伸梁制作工艺[J].机械工程学报,2010,46(1). |
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| 作者姓名： | 张段芹 褚金奎 侯志武 王立鼎 |
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| 作者单位： | 大连理工大学精密与特种加工教育部重点实验室,大连,116023 |
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| 基金项目： | 国家自然科学基金资助项目(50535030) |
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| 摘 要： | 根据感应耦合等离子(Inductively coupled plasma,ICP)刻蚀的机理,针对热氧化硅薄膜微拉伸梁的结构特点,研究ICP刻蚀制作3D微拉伸梁结构的工艺并解决其中的难点问题。介绍ICP刻蚀工艺参数对刻蚀质量的影响,包括存在的微负载效应和深宽比效应。详细介绍热氧化硅薄膜微拉伸梁的制作,其关键步骤是双掩膜两次ICP刻蚀形成阶梯状窗口结构,并在硅衬底表面形成释放了的热氧化硅薄膜梁。利用ICP刻蚀对单晶硅的高选择性,此制作工艺适用于各种薄膜的微拉伸梁制作。
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| 关 键 词： | 感应耦合等离子刻蚀 阶梯状窗口 热氧化硅薄膜 微拉伸梁 |
Micromachining Processing of 3D Micro Tensile Specimens Based on Inductively Coupled Plasma Etching |
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| ZHANG Duanqin,CHU Jinkui,HOU Zhiwu,WANG Liding.Micromachining Processing of 3D Micro Tensile Specimens Based on Inductively Coupled Plasma Etching[J].Chinese Journal of Mechanical Engineering,2010,46(1). |
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| Authors: | ZHANG Duanqin CHU Jinkui HOU Zhiwu WANG Liding |
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| Affiliation: | Key Laboratory for Precision & Non-traditional Machining of Ministry of Education/a>;Dalian University of Technology/a>;Dalian 116023 |
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| Abstract: | Based on the mechanism of inductively coupled plasma (ICP) etching,the micromachining processing of 3D micro tensile beams is researched in the light of the structure characteristics of the thermal silicon dioxide micro-tensile beams and with the purpose of solving the main problems in the processing. The influences of ICP etching process parameters on etching quality,including micro loading effect and aspect ratio effect in existence,are presented. The micromachining processing of the beams is introduced i... |
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| Keywords: | Inductively coupled plasma etching Stair-opening structure Thermal silicon dioxide film Micro tensile beams |
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