国外微型机械及微执行器的研究

由于高新技术的迅速发展,微型机械包括各种微传感器、微执行器和微控制器的研究和为一些尖端技术发展过程中的重要手段越来越受到国际科技界的重视。微型机械多种多样。如可在狭小的空间和危险场所进行维护检查的自行式微型机械、可进入管道、人体腔体甚至血管进行检查和手术的微型机械、扫描隧道显微镜(STM)和原子力显微镜上的分辨力以纳米计的微动机构、半导体领域和分子机械领域都出现了很精密的微型机械。国外为了提高微型机械的研究水平,最近还定期举办微型机构和微型机器人的比赛,包括爬山、爬崖和自我表演等项目,由于微型机械都必须有所动作,因此其中的微执行器(micro-actuator)最为重要,其工作原理多种多样。本文将就微型机械、微执行器的原理和国外的微型机构比赛作一综述。

Researches on Mieromachines and Microactuators at Abroad

With the rapid development of modern technologies,academic circles have paid more andmore attention to the research of micro machines.The micromachines are various,for exam-ple,self-controled micromachines can safeguard and inspect in some narrow and dangerousplaces;some of them can enter man's cavities even blood vessels to examine and operate thediseased parts;the microactuators in the scanning tunneling microscope(STM)and atomicforce microscope can reach a resolution in nm. Recently, in order to improve the research inmicromachines, microactuator and microrobot, contests which are composed of climbingmoutain. climbing cliff,selfshow etc.are held periodically in Japan. Because micromachinemust be movable,the microactuators become the most important in the domain of micromachines. This paper summarizes the principles of micromachines and microactuators,and thecontests at abroad.