| 基于Ansys的压电式四臂加速度计模拟分析 |
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| 引用本文： | 董明 惠春 徐爱兰. 基于Ansys的压电式四臂加速度计模拟分析[J]. 传感技术学报, 2006, 19(3): 637-641 |
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| 作者姓名： | 董明 惠春 徐爱兰 |
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| 作者单位： | 上海交通大学微纳科学技术研究院,薄膜与微细技术教育部重点实验室,微米/纳米加工技术国家级重点实验室,上海,200030 |
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| 摘 要： | 介绍了压电式四臂微加速度计的工作原理,耦合场分析原理以及ANSYS软件在压电分析中的具体应用.以压电式四臂加速度计为例,使用ANSYS软件对其进行了静态,模态等分析,得出了压电层厚度、悬臂厚度、长度对加速度计灵敏度的影响.在模态分析中得出了加速度计的前三阶固有频率和与之对应的振动形态.本文的结果可以直接应用到加速度计结构的优化设计.
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| 关 键 词： | 微加速度计 耦合场 |
| 文章编号： | 1004-1699（2006）03-0637-05 |
| 收稿时间： | 2005-07-18 |
| 修稿时间： | 2005-07-18 |
Analysis of Four-beam Piezoelectric Accelerometer Based on ANSYS |
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| Dong Ming,Hui Chun,Xu Ai-lan. Analysis of Four-beam Piezoelectric Accelerometer Based on ANSYS[J]. Journal of Transduction Technology, 2006, 19(3): 637-641 |
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| Authors: | Dong Ming Hui Chun Xu Ai-lan |
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| Affiliation: | National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Films and Micro fabrication of Ministry , of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China |
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| Abstract: | This paper addresses the theory of four-beam piezoelectric accelerometer, coupled-field analysis, and application of piezoelectric accelerometer. Static and model results of four-beam piezoelectric acceleromter are gained by using ANSYS. In static analysis, relation-ship between sensitivity and thickness of piezoelectric thin film, thickness of suspension beam , and length of the beam are discussed. In model analysis, this study demonstrates the first three fundamental resonant frequencis and the corresponding modes of the accelerometer. The results of of this paper can be readily applied to performance trade-off and design optimization. |
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| Keywords: | MEMS ANSYS |
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