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杂质和缺陷对非掺半绝缘LECGaAs霍耳测量的影响
引用本文:杨瑞霞 付浚. 杂质和缺陷对非掺半绝缘LECGaAs霍耳测量的影响[J]. 半导体杂志, 2000, 25(4): 5-11
作者姓名:杨瑞霞 付浚
作者单位:河北工业大学,天津
摘    要:研究了非掺杂半绝缘LEC GaAs霍耳参数温度关系,研究结果表明,杂 缺陷的不均匀分布引起的电势波动对霍耳测量结果有明显影响,存在电势波动的情况下,仅用霍耳测量不能测定真实的自由载流子浓度和费米能级位置。

关 键 词:非掺杂半绝缘LEC 霍耳测量 砷化镓 杂质 缺陷

Effect of Nonuniformity in Distributions of Impurities and Defects on Measurement of Hall Data for Undoped Semi-insulating LEC GaAs
YANG Rui xia,FU Jun,YU Ming,YU Hai xia,ZHANG Fu qiang. Effect of Nonuniformity in Distributions of Impurities and Defects on Measurement of Hall Data for Undoped Semi-insulating LEC GaAs[J]. , 2000, 25(4): 5-11
Authors:YANG Rui xia  FU Jun  YU Ming  YU Hai xia  ZHANG Fu qiang
Abstract:The temperature dependence of the Hall data was studied for undoped semi-insulating LEC GaAs. It was found that the potential fluctuations due to the nonuniformity of impurities and defects have a considerable effect on the Hall measurement. In the presence of the potential fluctuation, the exact carrier concentration and the Fermi level position can't be determined by solely Hall measuement.
Keywords:Undoped Semi-insulating LEC GaAs  Potential Fluctuation  Hall Measureme
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