| 扫描电声显微镜在涂层缺陷检测中的应用 |
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| 引用本文： | 童兆和 江福明. 扫描电声显微镜在涂层缺陷检测中的应用[J]. 无机材料学报, 1992, 7(3): 345-349 |
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| 作者姓名： | 童兆和 江福明 |
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| 作者单位： | 中国科学院上海硅酸盐研究所(童兆和，江福明，丁传贤)，中国科学院上海硅酸盐研究所(殷庆瑞) |
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| 摘 要： |
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| 关 键 词： | 电声显微镜 缺陷 涂层 |
Scanning Electron Acoustic Microscope Detection of Flaws in Coating Materials |
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| Tong Zhaohe Jiang Fumin Ding Chuanxian Yin Qingrui. Scanning Electron Acoustic Microscope Detection of Flaws in Coating Materials[J]. Journal of Inorganic Materials, 1992, 7(3): 345-349 |
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| Authors: | Tong Zhaohe Jiang Fumin Ding Chuanxian Yin Qingrui |
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| Abstract: | Physical process of electron acoustic imaging with scanning electron acoustic microscope(SEAM) was reviewed.Its ability of imaging and detecting flaws including pore,crack,in-homogeneous phase and inter-lamellar texture in coating materials was shown in this paper. |
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| Keywords: | Scanning electron acoustic microscope(SEAM) Fpaw detection Coating materials |
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