微梳齿驱动性能的耦合仿真研究

建立了考虑耦合作用的微梳齿驱动器仿真模型,研究了结构变化对梳齿的驱动性能的影响,并分析了结构基板及斜齿误差和偏移误差对结构驱动效果的影响。结果表明:基板造成的悬浮减小了驱动效果,驱动性能由于斜齿误差的存在而降低,偏移误差造成结构的横向不稳定。

COUPLED SIMULATIVE ANALYSIS FOR DRIVE CHARACTERISTIC OF MICRO-COMB STRUCTURES

The micro-comb is a common device used in micro-sensors,micro-accelerometers and micro-drivers. Its driver characteristics are significant to the precision of the sensors and drivers.The micro-comb in this paper is working under the electrostatic field.During driving process,the electrostatic field distribution between the comb’s teeth will be influenced by the driving distance of the structure,then make the driving distance change again till new balance reaches.Thusly,the electrostatic-structural coupling can not be negligible when calculating the driving distance.A model of a micro-comb driver considering electrostatic-structural coupling is established to analyze the characteristic of the comb driving when the structures vary.The different base structure,sloping error and side error are considered.The Finite element method is applied to this model.The computing results show that the levitation caused by the base reduces the driving capacity,so as the sloping error,and the side error can cause the instability in horizontal direction.