A low-impedance coplanar waveguide using an SrTiO3 thinfilm for GaAs power MMIC's |
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| Authors: | Tanabe M. Nishitsuji M. Anda Y. Ota Y. |
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| Affiliation: | Electron. Res. Lab., Matsushita Electron. Corp., Osaka; |
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| Abstract: | A novel structure for coplanar-waveguide transmission lines with low impedance and low loss is demonstrated in this paper. The new structure simply has a high dielectric SrTiO3 thin film underneath the coplanar conductors. Due to the high dielectric constant of SrTiO3, the coplanar line exhibited characteristic impedance as low as 18 Ω with a slot width of 5 μm and the center conductor width of 50 μm, while a conventional coplanar line on GaAs showed only 30 Ω with the same configuration. The newly developed coplanar structure is easily applicable for present GaAs monolithic-microwave integrated-circuit (MMIC) technology, especially for power MMIC's and low-impedance devices |
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