Absorption spectra of TiO2 thin films synthesized by the reactive radio-frequency magnetron sputtering of titanium

The optical absorption spectra of TiO₂ thin films with different phase compositions (anatase, rutile-brookite, anatase-rutile-brookite) are studied. The films are produced by the reactive radio-frequency magnetron sputtering of titanium in different atmospheres. It is shown that, on the assumption of the additivity of the contributions of each phase to the general spectrum with the fraction of the phase in the layer known, it is possible to use the method of subtraction of the spectra of individual phases. The fundamental absorption spectra of all of the crystal modifications detected in the multiphase films by structural studies are separated out, and the edges of the optical transitions in all of the phase components are established.