压电薄膜泵结构设计与性能分析

提高工作性能是压电泵研制工作的重点，该文针对目前压电泵使用中性能不稳定的问题，详细分析了腔体容积和阀的结构关系，提出了小腔体、复合阀式压电薄膜泵的设计观点，实验结果表明，采用较小的腔体体积（腔体压缩比足够大）时，压电泵具有较强的自吸能力，当工作频率为20Hz，施加电压100V时，以水作流体，实际测得最大输出压力为7．9kPa，最大输出量为16mL/min。

Structure Design and Performance Analysis of a Piezoelectric Pump

Enhancing the output performances of a piezoelectric pump is the key to its development research.In view of the problem of performance instability,the influences of chamber volume and valve structure on the output pressure and flow rate is analyzed,and then bring forward a novel design method to decrese the chamber volume and apply a compound valve.The test results show that when the chamber height is reduced enough,a piezoelectric pump is to be able to prime itself.The maximum pump pressure is about 7.9 kPa H 2O and water flow rate about 16 mL/min at the applied voltage of 100 V with operation frequency of 20 Hz.