多晶硅产业对环境的污染初探

多晶硅是太阳能电池材料之一，具有比较高的光电转换效率，但多晶硅产业的发展也导致环境污染的产生。本文主要从多晶硅太阳电池生产环节前期工序（硅提纯）和中期工序（清洁制绒、扩散制结、刻蚀清洁、化学气相沉积PECVD、丝网印刷、电极烧结）中所产生的污染进行论述。

First Discussion on the Pollution of Polysilicon Industry to the Environment

The polysilicon is one of the solar battery materials, and has a relatively high photoelectric conver-sion efficiency. However, polysilicon industry is along with the production of environmental pollution. This paper tries to discuss the pollution in the prior process （silicon purification） and the interim process （cleaning cloth with soft nap, diffusion junction, etching cleaning, chemical vapor deposition PECVD, screen printing, electrodes sin-tering technique） in the production of the polycrystalline silicon solar cell.