Output beam focusability of a Nd:glass zig-zag slab laser |
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| Authors: | Kim B.-T. Oishibashi Y. Kanabe T. Nakatsuka M. Nakai S. |
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| Affiliation: | Inst. of Laser Eng., Osaka Univ.; |
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| Abstract: | The focusability of a zig-zag optical path laser with a 230×65×5 mm Nd:glass for application to soft X-ray generation is described. A Q-switched laser output energy of 18.3 J with a pulse width of 28 ns was obtained in a phosphate glass LHG-5 (Nd:8 wt.%), with an extraction efficiency of 71% from a stored energy of 26 J at a pumping energy of 4 kJ. The focusability was achieved up to 6.2×1012 W/cm2 in a spot size of 100 μm, which was sufficient intensity to generate soft X-rays for X-ray lithography |
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