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| 新型功能陶瓷高效研磨半固着磨具(英文) | |
| 引用本文： | 吕冰海,袁巨龙,邓乾发,王志伟.新型功能陶瓷高效研磨半固着磨具(英文)[J].纳米技术与精密工程,2011,9(6):545-550. |
| 作者姓名： | 吕冰海 袁巨龙 邓乾发 王志伟 |
| 作者单位： | 1. 湖南大学国家高效磨削工程技术研究中心,长沙,410082 2. 湖南大学国家高效磨削工程技术研究中心,长沙 410082;浙江工业大学特种装备制造与先进加工技术教育部重点实验室,杭州 310014 3. 浙江工业大学特种装备制造与先进加工技术教育部重点实验室,杭州,310014 |
| 基金项目： | 国家自然科学基金资助项目(50705028;50535040) |
| 摘 要： | 为提高功能陶瓷游离磨料研磨效率,减少大颗粒杂质侵入造成的表面损伤,提出了一种高效研磨用的新型半固着磨具(SFAT).分析了SFAT的基本工作机理及其制作过程.通过对典型的功能陶瓷工件硅片的研磨实验,分析了SFAT研磨过程中工件表面质量、加工效率、材料去除形式,以及工艺参数对加工过程的影响.实验结果表明,采用#1000 SiC磨料制作的SFAT研磨后的硅片表面粗糙度在10 min内,从215 nm提高到了30 nm.定义了单位材料去除量内表面粗糙度下降值,作为评价工件精加工表面质量改善效率的指标.实验中,利用SFAT研磨硅片的单位材料去除量内表面粗糙度下降值是相似条件下游离磨料研磨的2倍,这表明利用SFAT加工能够迅速改善工件的表面质量,能够获得比游离磨料加工更高的精加工效率. |
| 关 键 词： | 半固着磨具 功能陶瓷 表面损伤 表面质量 研磨效率 |
Novel Semi-Fixed Abrasive Tool for High Lapping Efficiency of Functional Ceramics |
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| Lü Bing-hai,YUAN Ju-long,DENG Qian-fa,WANG Zhi-wei.Novel Semi-Fixed Abrasive Tool for High Lapping Efficiency of Functional Ceramics[J].Nanotechnology and Precision Engineering,2011,9(6):545-550. | |
| Authors: | Lü Bing-hai YUAN Ju-long DENG Qian-fa WANG Zhi-wei |
| Affiliation: | 1. National Engineering Research Cente：r for High Efficiency Grinding, Hunan University, Changsha 410082, China; 2. Key Laboratory of Special Purpose Equipment and Advanced Processing Technology of Ministry of Education, Zhejiang University of Technology, Hangzhou 310014, China) |
| Abstract: | To reduce the surface damage caused by undesired large particles and to improve the lapping efficiency in the loose abrasive lapping for functional ceramics,a novel semi-fixed abrasive tool(SFAT) for high lapping efficiency was put forward.The working principle and manufacturing process of SFAT were introduced.Surface quality,finishing efficiency,and material removal mode of the silicon wafer,a typical functional ceramic workpiece,in SFAT lapping were investigated.Experimental results show that the surface ... |
| Keywords: | semi-fixed abrasive tool functional ceramics surface damage surface quality lapping efficiency |
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