| 硅压阻式压力传感器的温度补偿 |
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| 引用本文： | 徐桂华. 硅压阻式压力传感器的温度补偿[J]. 数据采集与处理, 1994, 9(3): 229-232 |
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| 作者姓名： | 徐桂华 |
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| 作者单位： | 南京航空航天大学测试工程系 |
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| 摘 要： | 分析了硅压阻式压力传感器的温度误差来源，给出了通过长时间实验的温度与传感器输出电阻的数据，提出了对此类传感器温度误差的测量和修正方法，从而保证此类传感器在大温度范围内得到高精度使用。
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| 关 键 词： | 压力传感器 温度测量 补偿电路 硅压阻式 |
Temperature Compensation of the Silicon Piezoresistance Pressure Sensor |
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| Xu Guihua. Temperature Compensation of the Silicon Piezoresistance Pressure Sensor[J]. Journal of Data Acquisition & Processing, 1994, 9(3): 229-232 |
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| Authors: | Xu Guihua |
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| Abstract: | The source of error of the silion piezoresistance pressure sensor is analyzed.The variations of the output resistance data with temperatures have been studied through a long period of experiments. Accodingly, an efficient method of temperature compensation to correct the temperature error of this kind of sensors is presented herewith. This makes it possible to use the silicon piezoresistance pressure sensor as a high accuracy pressure measurement within a large temperature range. |
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| Keywords: | pressure sensor pressure measurements temperature measurement compensation circuits |
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