Abstract: | Si thin‐film solar cells are suitable to the sunbelt region due to a low temperature coefficient and to building integrated photovoltaics owing to flexible size, easily controllable transmittance, and an aesthetic design. Nevertheless, the application is limited until now due to their low conversion efficiency. We have developed a triple junction cell (a‐Si:H/a‐SiGe:H/µc‐Si:H) providing efficient light utilization. For the high efficiency, we have focused on the smoothing of high haze TCO, a low absorption window layer, a low refractive index interlayer, uniformity control of the thickness and crystalline volume fraction in the microcrystalline silicon layer, and a low absorption back reflector. Through these activities, we have achieved a world record of 13.4% stabilized efficiency in the small size cell (1 cm2) and 10.5% stabilized efficiency in the large area module (1.1 × 1.3 m2), certificated by the National Renewable Energy Laboratory and Advanced Industrial Science and Technology, respectively. This result was presented in solar cell efficiency tables (Version 41). At this moment, we have increased a stabilized efficiency of 11.2% (Output power 160 W) in the large area module. We will report on the advanced materials in detail for high efficiency. Copyright © 2014 John Wiley & Sons, Ltd. |