| 基于有限元分析的MEMS热电制冷器仿真设计研究 |
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| 引用本文： | 薛伟,何野,张一鸣,徐帆. 基于有限元分析的MEMS热电制冷器仿真设计研究[J]. 传感器与微系统, 2013, 0(12): 55-57,60 |
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| 作者姓名： | 薛伟 何野 张一鸣 徐帆 |
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| 作者单位： | [1]南京工业大学电子与信息工程学院,江苏南京210009 [2]江苏英特神斯科技有限公司,江苏南京210032 |
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| 摘 要： | 优化的结构对设计具有较高热电转换效率的微型MEMS热电制冷器具有重要的意义。应用伽辽金有限元法构造了热电效应的耦合控制方程组，通过计算机仿真，采用数值计算的方法考察了微型MEMS热电制冷器模型中P，N级材料长短，横截面积和基底材料厚度的变化对微型MEMS热电制冷器件热电转换效率的影响，对设计高效的微型MEMS热电制冷器件提供了一种理论依据。
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| 关 键 词： | 微机电系统 热电制冷器 有限元分析 塞贝克效应 帕尔贴效应 |
Study of simulation design of MEMS thermoelectric cooler based on finite element analysis |
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| XUE Wei,HE Ye,ZHANG Yi-ming,XU Fan. Study of simulation design of MEMS thermoelectric cooler based on finite element analysis[J]. Transducer and Microsystem Technology, 2013, 0(12): 55-57,60 |
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| Authors: | XUE Wei HE Ye ZHANG Yi-ming XU Fan |
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| Affiliation: | 2 ( 1. College of Electronics and Information Engineering, Nanjing University of Technology, Nanjing 210009, China; 2. Intellisense Co Ltd, Nanjing 210032, China) |
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| Abstract: | Optimal structure has an important significance on the design of high-performance MEMS micro- thermoelectric cooler （MTEC）. Galerkin finite element method （FEM）is applied to construct coupled control equations of thermoelectric effect. Through computer simulation, this study evaluates the effects of length varrotion PN level material thickness of the substrates and cross-sectional area of MEMS MTEC model on thermoelectric conversion efficiency by the method of numerical calculation, it provides a theoretical basis for design of high- efficient MEMS MTEC . |
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| Keywords: | MEMS thermoelectric cooler finite element analysis Seebeek effect Peltier effect |
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