基于MEMS的参量放大的设计与实现

参量放大效应是一种非线性振动放大效应，利用该效应可以极大地增加MEMS陀螺和加速度计等谐振式传感器的振幅，从而提高谐振式传感器检测灵敏度和信噪比。根据理论分析和有限元仿真结果，设计了一种MEMS参量放大结构。该结构采用SOG工艺加工，在950Pa左右的气压环境下对该结构进行了实验研究，并得到了该结构参激电压、相位与放大倍数之间的关系。实验结果表明：参量放大效应的实测结果与理论分析结果吻合很好，当参数激励电压为5.7V时，参量放大倍数超过50倍，大幅提高了结构的振幅，为以后应用参量放大效应提高MEMS惯性仪表性能提供了一种新方法。

Design and realization of parametric amplifier based on MEMS

Effect of parametric amplification is a nonlinear vibration amplification effect. This effect can greatly increase the amplitude of resonant sensor such as MEMS gyroscope and accelerometer, thereby improve the detection sensitivity and signal-to-noise ratio of the resonant sensor. A MEMS resonator with parametric amplification effect is designed according to theoretical analysis and finite element simulation. The resonator is fabricated with the SOG processing technology and experimental research is carried out under the pressure of 950 Pa, and the relationship between parametric excitation voltage and phase and magnification times is derived. Experimental results show that the measured results of effect of parametric amplification coincide well with theoretical analysis, and when the parametric excitation voltage is 5.7 V, the parametric amplification multiple is over 50 times,structure amplitude is significantly improved,which provides a new method to improve pertbrmanee of MEMS inertial appearance.