基于虚拟仪器技术的纳米时栅传感器实验研究

为了实现制造成本低、抗干扰性强、性能稳定的大量程、纳米精度位移测量，研究了一种基于交变电场耦合的纳米时栅位移传感器。利用虚拟仪器开发平台LabVIEW软件和PXI-5422任意波形发生器硬件设备相结合，实现标准波形的频率、幅值、相位的设置等功能。实验得出：通过调节激励信号的幅值可以避免安装位置的不同对纳米时栅精度的影响，调节相位可以提高其精度。虚拟仪器技术在纳米时栅实验中的应用为激励信号性能的改进与提高提供了技术支持，在纳米时栅特性的研究中提供方便。

Experimental research of nanometer time-grating sensor based on virtual instrument technology

In order to realize wide-ranged and nanoscale precision displacement measurement which requires low costs, strong anti-interference capabilities and stable performance, a kind of nanometer time-grating displacement sensor based on AC electric field coupling is researched. Functions l~ke the settings of the frequency, amplitude and phase of standard waveform can be achieved by combining the LabVIEW software of virtual instrument development platform with the hardware of PXI-5422 arbitrary waveform generator. The experiment concludes that phase adjustment can improve the precision through adjusting amplitude of excitation signal which can avoid effect of different installation sites on precision of nanometer time-grating. Application of virtual instrument technology in experiment of nanometer time-grating gives technological support to improvement and progress of function of excitation signal, which provide convenience to research on nanometer time-grating characteristics.