| 单晶硅放电蚀除机理研究及有限元分析 |
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| 引用本文： | 李健,刘志东,邱明波,田宗军,汪炜.单晶硅放电蚀除机理研究及有限元分析[J].中国机械工程,2010(7). |
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| 作者姓名： | 李健 刘志东 邱明波 田宗军 汪炜 |
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| 作者单位： | 南京航空航天大学; |
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| 基金项目： | 国家自然科学基金资助项目(50975142); 江苏省工业支撑计划资助项目(BE2009161) |
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| 摘 要： | 提出了单晶硅电火花加工蚀除机理假设,认为热应力在放电蚀除过程中起主要作用。建立了单晶硅电火花线切割放电模型,利用有限元法模拟了在单脉冲放电条件下单晶硅的温度场及热应力场分布。分别计算了单晶硅在温度场和热应力场作用下的蚀除量,并与实际放电切割蚀除量进行了对比,结果表明,实际蚀除量近似等于模拟得到的温度场与热应力场蚀除量之和,验证了对单晶硅电火花加工蚀除机理所作假设的正确性。
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| 关 键 词： | 单晶硅 电火花 蚀除机理 有限元 |
Study and FEM Analysis on Discharge Erosion Mechanism of Monocrystalline Silicon |
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| Li Jian Liu Zhidong Qiu Mingbo Tian Zongjun Wang WeiNanjing University of Aeronautics , Astronautics,Nanjing.Study and FEM Analysis on Discharge Erosion Mechanism of Monocrystalline Silicon[J].China Mechanical Engineering,2010(7). |
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| Authors: | Li Jian Liu Zhidong Qiu Mingbo Tian Zongjun Wang WeiNanjing University of Aeronautics Astronautics Nanjing |
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| Affiliation: | Li Jian Liu Zhidong Qiu Mingbo Tian Zongjun Wang WeiNanjing University of Aeronautics , Astronautics,Nanjing,210016 |
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| Abstract: | Assumption of erosion mechanism of EDM on monocrystalline silicon was proposed.It was considered that thermal stress played the leading role during the erosion process.Discharge model of single pulse was established on WEDM,the temperature field and the thermal stress field of single-pulse discharge condition was analyzed based on finite element method.Theoretical amount of erosion of the silicon was calculated under the temperature field and thermal stress field,and was compared with the actual amount of e... |
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| Keywords: | monocrystalline silicon electric discharge machining(EDM) erosion mechanism finite element |
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